Project updates, technical articles, and release announcements from the OpenLithoHub team.
We're excited to announce the first stable release of OpenLithoHub, bringing standardized evaluation metrics and workflow tools to the computational lithography community.
The new B-spline fitting engine enables smooth curvilinear contour export, reducing mask write time by 18% compared to Manhattan approximations.
Our partnership with NeurIPS'25 brings the first large-scale sub-28nm lithography simulation dataset to the open-source community.
A deep dive into our Monte Carlo photon noise simulation and how it correlates with real-world fab yield data at the 3nm node.